Micro-Nanofabrication and Thin-Film Processing

This course investigates the technology and underlying science of micro-and nano-fabrication, which are the methods used to build billions of electronic and optoelectronic devices on a chip, as well as general small sensors and actuators generally referred to as micro-electromechanical systems (MEMS). The general approach involves deposition, modification, and patterning of layers less than one-micrometer thick, hence the generic term "thin-film" processing. Topics covered: film deposition and growth via physical and chemical vapor deposition, photolithography, pattern transfer, plasma-processing, ion-implantation, and vacuum science.